Plasma Etching In A Microwave

Deep inside your smartphone are a handful of interesting miniature electromechanical devices. The accelerometer is a MEMS device, and was produced with some of the most impressive industrial processes on the planet. Sometimes, these nanoscale devices are produced with plasma etching, which sounds about as cool as it actually is. Once the domain of impossibly expensive industrial processes, you can now plasma etch materials in a microwave.

Of course, making plasma in this way is nothing new. If you cut a grape in half and plop it in a microwave, some really cool stuff happens. This is just the 6th …read more

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